English

国内自主研发首套碳化硅晶锭激光剥离设备投产

770
2024-08-26 11:51:40
See translation

       近日,从江苏通用半导体有限公司传来消息,由该公司自主研发的国内首套的8英寸碳化硅晶锭激光全自动剥离设备正式交付碳化硅衬底生产领域头部企业广州南砂晶圆半导体技术有限公司,并投入生产。

 



图:8英寸SiC晶锭激光全自动剥离设备
       该设备可实现6英寸和8英寸碳化硅晶锭的全自动分片,包含晶锭上料、晶锭研磨、激光切割、晶片分离和晶片收集,一举填补了国内碳化硅晶锭激光剥离设备领域研发、制造的市场空白,突破了国外的技术封锁,将极大地提升我国碳化硅芯片产业的自主化、产业化水平。

       该设备年可剥离碳化硅衬底20000片,实现良率95%以上,与传统的线切割工艺相比,大幅降低了产品损耗,而设备售价仅仅是国外同类产品的1/3。

       近年来,碳化硅功率器件在大功率半导体市场中所占的份额不断提高,并被广泛应用于新能源汽车、城市轨道交通、风力发电、高速移动、物联网等一系列领域。

       但是,由于材料的高硬度、高脆性的特点,在使用传统的砂浆线、金刚石线等冷切工艺切割、剥离碳化硅晶锭时,存在效率过低、损耗过高的缺点,导致衬底产能提升过慢,远远不能满足市场的实际需求。由于产能严重不足,碳化硅衬底的生产成本一直居高不下,在器件成本构成中,碳化硅器件中衬底要占成本的47%,远远高于硅基器件的7%。

       江苏通用半导体有限公司董事长陶为银介绍,采用基于激光工具和加工技术切割、剥离碳化硅晶锭,可实现高效、精确和高质量的制造,极大地降低碳化硅衬底的生产成本,减少浪费和环境影响。

       碳化硅器件属于宽禁带半导体,不但在民用领域应用广泛,在国防领域也普遍应用。因此对相关技术,西方发达国家都实行出口管制。目前,只有一家日本企业生产制造碳化硅晶锭激光剥离设备,售价高达一亿元,且对中国实施禁售。

       江苏通用半导体有限公司成立于2019年,致力于高端半导体产业装备与材料的研发和制造,于2020年推出国内首台半导体激光隐形切割机;2022年成功推出国内首台18纳米及以下SDBG激光隐切设备(针对3D Memory);2024年研制成功SDTT激光隐切设备(针对3D HBM)。

来源:中企网

Related Recommendations
  • The fourth CEO of this laser giant takes over strongly

    According to the latest news, on June 3, 2024, Coherent Corp. appointed Jim Anderson as CEO and he will also become a member of the board, replacing Vincent "Chuck" Mattera.Image source: CoherentAnderson (left) Mattera (right)Dr. Vincent "Chuck" D. Mattera, Jr. previously notified the Coherent Board of Directors on February 20, 2024, stating that he would resign from the position of CEO upon his ...

    2024-06-07
    See translation
  • Laser technology reveals hidden gases in complex mixtures

    Laser Network reported on January 11th that modern equipment has been fine tuned to detect highly specific gases, including trace gases found in the atmosphere, gases present in combustion exhaust emissions, and gases used in technology plasma applications.They achieve this by calculating the percentage of light at a certain wavelength that is absorbed or attenuated by the sample. This way, the co...

    2024-01-11
    See translation
  • Chinese researchers have developed for the first time a room temperature HoYLF thin film laser

    In a study published in Optics Express, the research team led by Professor Fu Yuxi of the Xi'an Institute of Optics and Precision Mechanics (XIOPM) of the Chinese Academy of Sciences developed the room temperature holmium doped lithium yttrium fluoride (Ho: YLF) composite thin slice laser for the first time, which can achieve high efficiency and high-quality CW laser output.Laser devices operating...

    02-21
    See translation
  • The Application of Femtosecond Laser in Precision Photonics Manufacturing

    Femtosecond laser emits ultra short light pulses with a duration of less than 1 picosecond, reaching the femtosecond domain. The characteristics of femtosecond lasers are extremely short pulse width and high peak intensity.Ultra short blasting can minimize waste heat, ensure precise material processing, and minimize incidental damage. Their peak intensities can cause nonlinear optical interactions...

    2024-02-28
    See translation
  • Historic Moment! The 100th TruLaser Cell Series 3D Five-Axis Laser Cutting Machine Successfully Rolls Off the Production Line in China

    Driven by the global trend of lightweighting in new energy vehicles (NEVs), TRUMPF has reached a significant milestone in Taicang, Jiangsu—the successful rollout of the 100th TruLaser Cell series 3D five-axis laser cutting machine. This achievement is more than just a numerical breakthrough; it symbolizes the deep integration of German technology with Chinese manufacturing and underscores TRUMPF's...

    03-14
    See translation