Türkçe

国内自主研发首套碳化硅晶锭激光剥离设备投产

346
2024-08-26 11:51:40
Çeviriyi gör

       近日,从江苏通用半导体有限公司传来消息,由该公司自主研发的国内首套的8英寸碳化硅晶锭激光全自动剥离设备正式交付碳化硅衬底生产领域头部企业广州南砂晶圆半导体技术有限公司,并投入生产。

 



图:8英寸SiC晶锭激光全自动剥离设备
       该设备可实现6英寸和8英寸碳化硅晶锭的全自动分片,包含晶锭上料、晶锭研磨、激光切割、晶片分离和晶片收集,一举填补了国内碳化硅晶锭激光剥离设备领域研发、制造的市场空白,突破了国外的技术封锁,将极大地提升我国碳化硅芯片产业的自主化、产业化水平。

       该设备年可剥离碳化硅衬底20000片,实现良率95%以上,与传统的线切割工艺相比,大幅降低了产品损耗,而设备售价仅仅是国外同类产品的1/3。

       近年来,碳化硅功率器件在大功率半导体市场中所占的份额不断提高,并被广泛应用于新能源汽车、城市轨道交通、风力发电、高速移动、物联网等一系列领域。

       但是,由于材料的高硬度、高脆性的特点,在使用传统的砂浆线、金刚石线等冷切工艺切割、剥离碳化硅晶锭时,存在效率过低、损耗过高的缺点,导致衬底产能提升过慢,远远不能满足市场的实际需求。由于产能严重不足,碳化硅衬底的生产成本一直居高不下,在器件成本构成中,碳化硅器件中衬底要占成本的47%,远远高于硅基器件的7%。

       江苏通用半导体有限公司董事长陶为银介绍,采用基于激光工具和加工技术切割、剥离碳化硅晶锭,可实现高效、精确和高质量的制造,极大地降低碳化硅衬底的生产成本,减少浪费和环境影响。

       碳化硅器件属于宽禁带半导体,不但在民用领域应用广泛,在国防领域也普遍应用。因此对相关技术,西方发达国家都实行出口管制。目前,只有一家日本企业生产制造碳化硅晶锭激光剥离设备,售价高达一亿元,且对中国实施禁售。

       江苏通用半导体有限公司成立于2019年,致力于高端半导体产业装备与材料的研发和制造,于2020年推出国内首台半导体激光隐形切割机;2022年成功推出国内首台18纳米及以下SDBG激光隐切设备(针对3D Memory);2024年研制成功SDTT激光隐切设备(针对3D HBM)。

来源:中企网

İlgili öneriler
  • Researchers have created an X Lidar lidar to help airports operate during volcanic eruptions

    Engineer and inventor Ezequiel Pawelko is one of the creators of X Lidar, a laser technology that can detect volcanic ash in the atmosphere, draw safe flight paths, and maintain airport operations during volcanic eruptions. Nowadays, he is engaged in other applications such as detecting space debris, monitoring natural resources and fisheries, preventing fires, and drawing radiation and wind maps ...

    2023-12-27
    Çeviriyi gör
  • Graphene terahertz absorber and graded plasma metamaterials

    Optical metamaterials are an effective way to utilize their superior photon capture capabilities. Therefore, perfect absorbers can be achieved through nanoscale resonant plasmas and metamaterial structures.Metamaterial perfect absorbers (MPAs) are typically composed of periodic subwavelength metals (such as plasma superabsorbers) or dielectric resonance units. Compared with static passive physical...

    2024-05-20
    Çeviriyi gör
  • Vast's Haven-1 program has become the world's first commercial space station equipped with SpaceX Starlink lasers

    Vast's Haven-1 program will become the world's first commercial space station, equipped with SpaceX's Starlink laser terminal, providing connections to its crew users, internal payload racks, external cameras, and instruments at speeds of gigabits per second and low latency.Max Haot, CEO of Vast, said: "If you need to provide high-speed, low latency, and continuous Internet connection on the orbit...

    2024-04-10
    Çeviriyi gör
  • Entangled photon pairs generated by quantum light sources can be used for quantum computing and cryptography

    A new device composed of semiconductor rings generates pairs of entangled photons, which can be used in photon quantum processors.Quantum light sources generate entangled photon pairs, which can be used in quantum computing and cryptography. A new experiment has demonstrated a quantum light source made from semiconductor gallium nitride. This material provides a multifunctional platform for devic...

    2024-03-30
    Çeviriyi gör
  • Researchers at Georgia Institute of Technology have developed cost-effective nanoscale printing

    A team of researchers from Georgia Institute of Technology has developed a scalable printing system for metal nanostructures using a new technology called superluminescent light projection. The inventor of this technology Dr. Sourabh Saha and Jungho Choi submitted a patent application for nanoscale printing.Nowadays, the cost of existing nanoscale printing technologies hinders their widespread use...

    2024-02-19
    Çeviriyi gör