On December 20, Juguang Technology, a global supplier of high-power semiconductor lasers and micro optics, released silicon optical components with Sag.

Nowadays, silicon optical components have been widely used in 1.2-7 μ Various infrared applications within the m wavelength range, such as near-infrared imaging, optical communications, biomedical and radiation sensing technologies. This material has the advantages of high refractive index (n=3.4), high hardness resistance, low temperature sensitivity, and low density (2.329g/cm3), especially suitable for weight sensitive applications. Typical processing technologies of silicon optical components are etching and CNC processing. Due to process constraints, Sag of silicon optical components is often less than 60 μm.

The optical components of Toro Optical Technology adopt unique wafer level synchronous structural technology, which can prepare micro optical components on the wafer substrate of any inorganic optical materials. From CaF2 and MgF2 crystals, to high-grade fused quartz or high refractive index glass, to semiconductor industry quality silicon and germanium and other materials, the products cover a wide range of wavelengths from deep ultraviolet to far infrared, Moreover, extremely complex devices can be constructed based on the optical morphology of one-dimensional aspherical cylinder and prism geometry. When this technology is applied to silicon materials, it can combine the essential characteristics of silicon materials, and take into account the requirements of precision alignment and assembly, so that it can be applied to advanced opto mechanical and optoelectronic fields.

Silicon optical wafer

The silicon optical components processed by Toro Technology's wafer level synchronous structural technology can reach sagittal height (Sag) of up to 4mm at 0 °~80 ° exit angle, which maximizes the numerical aperture (NA) that the silicon optical components can reach and exceeds the limit of silicon optical components processed by traditional technology, thus creating advanced silicon optical products that are difficult to achieve by traditional technology, such as large sagittal height eccentric microlens arrays Shining gratings, chirped arrays or integrated prisms, as well as the production of small and micro sized single silicon prisms, cylindrical mirrors and other short wave and medium wave infrared optical devices through precision slicing technology.

Symmetric and asymmetric microstructures fabricated by Torch Optics wafer level synchronous structural manufacturing technology

As Dr. Daniel Braam, product line manager of our Laser Optics Division, said, "The possibilities of this technology are almost limitless - the optical solutions we provide are unique and can promote the innovation of some applications. Now, we have expanded it to silicon optical components to provide subversive solutions for the next generation of silicon optical technology, biosensors, intelligent terminals and other applications."

Toro Technologies wafer level synchronous structured manufacturing technology can produce a maximum of 300 x 300mm2 micro optical wafers, and tens of thousands of high-quality micro optical lenses can be produced in just two steps. This production technology is highly scalable and cost-effective, and is suitable for large batch production, so as to meet the needs of various batch application scenarios such as the Internet of Things, biosensors, and intelligent terminals. The unique performance and cost advantages of this production technology have been fully reflected in the application of fiber laser pumping: Juguang Technology provides core components for fiber laser pumping applications -- fast axis collimator (FAC). As a major supplier of fast axis collimator (FAC) in the world, Juguang Technology delivers more than 18 million of them every year.

300mm x 300mm wafers produced with wafer level synchronous structural technology

The surface reflectivity of uncoated silicon optical components in their transparent areas reaches 30%, and the transmittance is very low. Toro Technology adopts film system suitable for silicon materials and optimized coating production process to ensure product performance and long-term reliability. Toro Technology has coating design, R&D and processing capabilities, as well as film analysis and measurement capabilities, and can provide customized services for different types of coatings from deep ultraviolet (DUV), visible light (VIS) to infrared (IR) band applications to meet the needs of optical communications, instruments, medical and other applications.

Reflectivity test curve of antireflection coating

Since its establishment, Juguang Technology has always focused on the research and development of basic components of photonic technology and related application products, and actively expanded innovative application fields. Juguang Technology insists on making continuous efforts to become a global reliable photon application solution provider through technological innovation, excellent manufacturing and rapid response.

As a national high-tech enterprise, Juguang Technology was established in September 2007. It is mainly engaged in the R&D, production and sales of high-power semiconductor laser components and raw materials ("Photon Generation") and laser optical components ("Photon Control") at the upstream of the photon industry chain. Currently, it is actively expanding the business of photon application modules, modules and subsystems ("Photon Application Solutions") in the middle of the photon industry chain, Focus on automobile application, pan semiconductor manufacturing process and medical health. At present, Juguang Technology has production bases and core technical teams in Xi'an, Dongguan, Haining, China, and Dortmund, Germany, and has passed ISO 14001, ISO 45001, ISO 9001:2015, IATF 16949 and other quality management system certifications. In 2017, Juguang Technology successfully acquired LIMO GmbH, a leading technology in the global micro optics field, and completed the global brand unification in January 2022. In December 2021, Juguang Technology was successfully listed on the Science and Technology Innovation Board of Shanghai Stock Exchange.

Source: Juguang Technology

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