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Scientists are exploring new ways to get around limitations on the lithography machines used to produce microchips. Researchers are using particle accelerators to create new laser sources that could lay the foundation for the future of semiconductor manufacturing.Plans are underway to build a particle accelerator with a circumference between 100 and 150 meters (328 and 492 feet), about the size of...
Lithography is one of the core processes in semiconductor manufacturing, and extreme ultraviolet lithography technology, as a new generation lithography technology, is also in a rapid development stage. The basic principle is to use photoresist (also known as photoresist) to form corrosion resistance due to photochemical reactions after being photosensitive, and to engrave the patterns on the mask...
It is reported that researchers from Foshan University, the Institute of Chemical Defense of the Academy of Military Sciences, the National Defense Technology Key Laboratory of Equipment Remanufacturing Technology of the Armored Forces Academy, and Chengdu State owned Jinjiang Machinery Factory have summarized and reported the latest progress of machine learning in defect detection and prediction ...
Recently, a Japanese research team has developed a vertical deep ultraviolet emitting semiconductor laser device based on AlGaN, which is expected to be applied in laser processing, biotechnology, and medical fields.As is well known, ultraviolet (UV) is an electromagnetic wave with a wavelength range of 100 to 380nm. These wavelengths can be divided into three regions: UV-A (315-380 nm), UV-B (280...
Recently, the High Power Laser Element Technology and Engineering Department of the Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, has made progress in the research of composite based picosecond mirrors. The related research results were published in Optics and Laser Technology under the title of "Hybrid Material Based Mirror Coatings for Picosed Laser Applications"....