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Scientists at the Technical University of Munich have made significant progress in measuring the Earth's rotation with unprecedented accuracy. Now, the ring laser from the Wettzell Geodetic Observatory can be used to capture data at a quality level unmatched anywhere in the world. These measurements are crucial for determining the position of the Earth in space, assisting climate research, and imp...
EV Group, a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology, and semiconductor markets, and Silicon Austria Labs, a leading electronic systems research center in Austria, announced that SAL has received and installed multiple EVG lithography and photoresist processing systems in its MicroFab at the R&D cleanroom facility in Filach, Austria.These devices...
Main author: Yanming Zhang, Wentao Yana*The first unit: National University of SingaporePublished Journal: Acta MaterialiaResearch backgroundIndustry pain point: Although laser powder bed melting (LPBF) technology can manufacture complex components, the lack of consistent product quality is still the core bottleneck restricting its industrial application. Research has shown that up to 35% of proce...
Summary:To filter out infrared light from the driving light source in the extreme ultraviolet lithography (EUVL) light source system, a rectangular grating structure needs to be fabricated on the surface of the collection mirror. However, the collection mirror grating usually undergoes deformation during the manufacturing process, resulting in a decrease in filtering efficiency. The process errors...
Recently, Zhang Xin's research team from the Institute of Oceanography, Chinese Academy of Sciences, based on the in-situ laser Raman spectroscopy technology, made new progress in the in-situ recognition and quantification of methane carbon isotopes by using the significant differences in the Raman spectra of methane carbon isotopes (13CH4 and 12CH4). The relevant results were recently published i...