Deutsch

Preparation of all silicon dielectric metasurface by femtosecond laser modification combined with wet etching, achieving ideal compatibility with complementary metal oxide semiconductor technology

471
2023-10-23 14:53:50
Übersetzung anzeigen

The fully dielectric element surface has the characteristics of low material loss and strong field localization, making it very suitable for manipulating electromagnetic waves at the nanoscale. Especially the surface of all silicon dielectric elements can achieve ideal compatibility with complementary metal oxide semiconductor technology, making it an ideal choice for large-scale monolithic integration of photonic chips. However, in traditional silicon micro processing, the combination of mask lithography and active ion etching involves multiple preprocessing stages, resulting in increased costs and processing time.

This article proposes a femtosecond laser direct writing method, which uses femtosecond laser to process silicon below the ablation threshold and wet chemical etching to achieve the surface of all silicon dielectric resonant elements. This method utilizes different etching rates between laser modified and untreated regions to achieve the manufacturing of large-scale patterned silicon surfaces in a simple and economical manufacturing method.

The Ioanna Sakellari team from Greece utilized ultrafast laser modification and wet chemical etching to form a two-dimensional micro nano circular array structure on silicon surface. By adjusting the size of micro nano stage units on the silicon surface and changing the surface diameter of the stage, the resonance frequency of the metasurface can be effectively controlled. The Fourier transform infrared spectra of linearly polarized incident light with different silicon based nano cone array structures were experimentally measured, and the scale of 200 was characterized μ M × two hundred μ The infrared light transmittance of different nano cone array structures of m, with a cone height of approximately 0.95 μ m. The period of the array in both the x and y directions is 2.42 μ m. The surface diameters on the circular platform are 220nm (green), 380nm (blue), and 740nm (red), respectively. The electron microscope images of different nano cone array structures prepared are shown in the following figure:

Figure 1. Structure of a two-dimensional micro nano cone array on silicon surface

Source: Sohu

Ähnliche Empfehlungen
  • Application of Airborne Lidar Calibration Board in Various Fields

    With the rapid development of technology, airborne LiDAR technology has become one of the key technologies in modern surveying, remote sensing, navigation and other fields. As an important component of this technology, the airborne LiDAR calibration board plays a crucial role in ensuring the accuracy and stability of the radar system. This article will explore the application and importance of air...

    2024-04-08
    Übersetzung anzeigen
  • New, low-cost, and high-efficiency photonic integrated circuits

    The rapid development of photonic integrated circuits (PICs) has combined multiple optical devices and functions on a single chip, completely changing optical communication and computing systems.For decades, silicon-based PICs have dominated the field due to their cost-effectiveness and integration with existing semiconductor manufacturing technologies, despite their limitations in electro-optic ...

    2024-05-10
    Übersetzung anzeigen
  • Shanghai Institute of Optics and Fine Mechanics has made progress in the field of femtosecond laser air filamentation self focusing threshold research

    Recently, the research team of the State Key Laboratory of Intense Field Laser Physics of the Chinese Academy of Sciences Shanghai Institute of Optics and Fine Mechanics has made progress in the research on the repetition rate dependent femtosecond laser air filamentation self focusing threshold. The relevant research results were published in Optics Express under the title "Pulse repetition rate ...

    2024-08-02
    Übersetzung anzeigen
  • NASA plans to use lasers to measure the impact of exhaust gases on the lunar surface during landing, in order to plan lunar landings more effectively

    Recently, NASA's official website showed that a research team at the University of Central Florida has tested an instrument called Ejecta STORM, which aims to measure the size and velocity of surface particles generated by exhaust gases from rocket powered landers on the moon or Mars.According to NASA, when a spacecraft lands on the moon or Mars, rocket exhaust plumes can produce efflorescent ejec...

    2023-10-31
    Übersetzung anzeigen
  • Continuation of the Term of President and CEO of Jena Germany

    Recently, the supervisory board of Jenoptik, a leading German laser technology company, announced an important decision: to extend and confirm the term of Dr. Stefan Traeger as Chairman of the Executive Board, with a new term of three years starting from July 1, 2025, and the contract validity period correspondingly extended to June 30, 2028. Dr. Stefan Traeger has been serving as the President ...

    2024-09-06
    Übersetzung anzeigen